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The effects of sputtering powers on the structural, optical and electrical properties of β -Ga 2 O 3 thin films prepared by magnetron sputtering |
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Titel: |
The effects of sputtering powers on the structural, optical and electrical properties of β -Ga 2 O 3 thin films prepared by magnetron sputtering |
Auteur: |
Ji, Feng Chen, Zhichao Li, Yadan Wang, Yahan Ge, Xuehao Jiang, Kai Zhu, Hai Wang, Xianghu |
Verschenen in: |
Physica. B, Condensed matter |
Paginering: |
Jaargang 713 () nr. C pagina's p. |
Jaar: |
2025 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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