Experimental and theoretical insights on the structural and optical properties of GeOx thin films deposited via RF magnetron sputtering under varying oxygen percentage
Title:
Experimental and theoretical insights on the structural and optical properties of GeOx thin films deposited via RF magnetron sputtering under varying oxygen percentage
Author:
Şenadım Tüzemen, E. Hopoğlu, H. Sarıtaş, S. Aydınoğlu, H.S. Ertuğrul, M. Maslov, M.M. Kaya, S. Ungan, F. Gür, E.