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Influences of the RF power ratio on the optical and electrical properties of GZO thin films by DC coupled RF magnetron sputtering at room temperature |
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Titel: |
Influences of the RF power ratio on the optical and electrical properties of GZO thin films by DC coupled RF magnetron sputtering at room temperature |
Auteur: |
Peng, Shou Yao, Tingting Yang, Yong Zhang, Kuanxiang Jiang, Jiwen Jin, Kewu Li, Gang Cao, Xin Xu, Genbao Wang, Yun |
Verschenen in: |
Physica. B, Condensed matter |
Paginering: |
Jaargang 503 (2016) nr. C pagina's 6 p. |
Jaar: |
2016 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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