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Investigation of the Si doping effect in β-Ga2O3 films by co-sputtering of gallium oxide and Si |
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Titel: |
Investigation of the Si doping effect in β-Ga2O3 films by co-sputtering of gallium oxide and Si |
Auteur: |
Takakura, Kenichiro Funasaki, Suguru Tsunoda, Isao Ohyama, Hidenori Takeuchi, Daisuke Nakashima, Toshiyuki Shibuya, Mutsuo Murakami, Katsuya Simoen, Eddy Claeys, Cor |
Verschenen in: |
Physica. B, Condensed matter |
Paginering: |
Jaargang 407 (2012) nr. 15 pagina's 3 p. |
Jaar: |
2012 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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