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                                       Details for article 2607 of 6539 found articles
 
 
  Influence of substrate bombardment on sputtered a-Si:N thin film properties
 
 
Title: Influence of substrate bombardment on sputtered a-Si:N thin film properties
Author: Attaf, A.
Benkhedir, M.L.
Aida, M.S.
Appeared in: Physica. B, Condensed matter
Paging: Volume 355 (2005) nr. 1-4 pages 10 p.
Year: 2005
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 2607 of 6539 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands