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Characterization of interface roughness in W/Si multilayers by high resolution diffuse X-ray scattering |
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Title: |
Characterization of interface roughness in W/Si multilayers by high resolution diffuse X-ray scattering |
Author: |
Salditt, T. Lott, D. Metzger, T.H. Peisl, J. Vignaud, G. Legrand, J.F. Grübel, G. Høghøi, P. Schärpf, O. |
Appeared in: |
Physica. B, Condensed matter |
Paging: |
Volume 221 (1996) nr. 1-4 pages 5 p. |
Year: |
1996 |
Contents: |
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Publisher: |
Elsevier Science B.V. All rights reserved |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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