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                                       Details for article 15178 of 18303 found articles
 
 
  Structure and optical properties of HfO2 films on Si (100) substrates prepared by ALD at different temperatures
 
 
Title: Structure and optical properties of HfO2 films on Si (100) substrates prepared by ALD at different temperatures
Author: Li, Sai
Zhang, Yong
Yang, Dewei
Yang, Wen
Chen, Xiaobo
Zhao, Hengli
Hou, Jing
Yang, Peizhi
Appeared in: Physica. B, Condensed matter
Paging: Volume 584 () nr. C pages p.
Year: 2020
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 15178 of 18303 found articles
 
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