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Journal description
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Details for article 122 of 6662 found articles
| Title: |
AlN thin films grown by ion-beam-enhanced deposition and its application to SOI materials |
| Author: |
Men, Chuanling Xu, Zheng An, Zhenghua Xie, Xinyun Zhang, Miao Lin, Chenglu |
| Appeared in: |
Physica. B, Condensed matter |
| Paging: | Volume 324 (2002) nr. 1-4 pages 6 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 122 of 6662 found articles
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