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                                       Details for article 3170 of 18303 found articles
 
 
  Direct observation of substitutional Fe atoms in Si and SOI wafers at 1273K
 
 
Title: Direct observation of substitutional Fe atoms in Si and SOI wafers at 1273K
Author: Yoshida, Yutaka
Ogawa, Shigeru
Arikawa, Kazuhiro
Appeared in: Physica. B, Condensed matter
Paging: Volume 340-342 (2003) nr. C pages 4 p.
Year: 2003
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 3170 of 18303 found articles
 
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