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Journal description
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Details for article 3502 of 6539 found articles
| Title: |
Mask-edge effects at low ion implantation energies for cluster covered silicon |
| Author: |
Hul'ko, O.V Danailov, D Karpuzov, D Zinke-Allmang, M |
| Appeared in: |
Physica. B, Condensed matter |
| Paging: | Volume 266 (1999) nr. 4 pages 11 p. |
| Year: |
1999 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3502 of 6539 found articles
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