|
Low-temperature photoluminescence characterization of defects formation in hydrogen and helium implanted silicon at post-implantation annealing |
|
|
|
Titel: |
Low-temperature photoluminescence characterization of defects formation in hydrogen and helium implanted silicon at post-implantation annealing |
Auteur: |
Mudryi, A.V. Korshunov, F.P. Patuk, A.I. Shakin, I.A. Larionova, T.P. Ulyashin, A.G. Job, R. Fahrner, W.R. Emtsev, V.V. Davydov, V.Yu. Oganesyan, G. |
Verschenen in: |
Physica. B, Condensed matter |
Paginering: |
Jaargang 308-310 (2001) nr. C pagina's 4 p. |
Jaar: |
2001 |
Inhoud: |
|
Uitgever: |
Elsevier Science B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|