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                                       Details for article 15989 of 18303 found articles
 
 
  Temperature effect on defect evolution in 800keV Ge-implanted Si/SiGe multi-layered structure
 
 
Title: Temperature effect on defect evolution in 800keV Ge-implanted Si/SiGe multi-layered structure
Author: Gaiduk, P.I.
Larsen, A.Nylandsted
Hansen, J.Lundsgaard
Wendler, E.
Wesch, W.
Appeared in: Physica. B, Condensed matter
Paging: Volume 340-342 (2003) nr. C pages 5 p.
Year: 2003
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 15989 of 18303 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands