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X-ray scattering study of interface roughness correlation in Mo/Si and Ti/C multilayers for X-UV optics |
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Title: |
X-ray scattering study of interface roughness correlation in Mo/Si and Ti/C multilayers for X-UV optics |
Author: |
Jergel, M. Holý, V. Majková, E. Luby, Š. Senderák, R. Stock, H.J. Menke, D. Kleineberg, U. Heinzmann, U. |
Appeared in: |
Physica. B, Condensed matter |
Paging: |
Volume 253 (1998) nr. 1-2 pages 12 p. |
Year: |
1998 |
Contents: |
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Publisher: |
Elsevier Science B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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