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In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction |
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Titel: |
In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction |
Auteur: |
Zhuang, Y Pietsch, U Stangl, J Holý, V Darowski, N Grenzer, J Zerlauth, S Schäffler, F Bauer, G |
Verschenen in: |
Physica. B, Condensed matter |
Paginering: |
Jaargang 283 (2000) nr. 1-3 pagina's 5 p. |
Jaar: |
2000 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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