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  Nanometer-scale lithography for large lateral structures
 
 
Title: Nanometer-scale lithography for large lateral structures
Author: Romijn, J.
van der Drift, E.
Appeared in: Physica. B, Condensed matter
Paging: Volume 152 (1988) nr. 1-2 pages 8 p.
Year: 1988
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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