The spray-ILGAR® (ion layer gas reaction) method for the deposition of thin semiconductor layers: Process and applications for thin film solar cells
Titel:
The spray-ILGAR® (ion layer gas reaction) method for the deposition of thin semiconductor layers: Process and applications for thin film solar cells
Auteur:
Fischer, Christian-Herbert Allsop, Nicholas A. Gledhill, Sophie E. Köhler, Tristan Krüger, Martin Sáez-Araoz, Rodrigo Fu, Yanpeng Schwieger, Robert Richter, Johannes Wohlfart, Peter Bartsch, Peter Lichtenberg, Nils Lux-Steiner, Martha C.