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Damage-free sputtering of a transparent conductive oxide using a triode plasma configuration |
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Title: |
Damage-free sputtering of a transparent conductive oxide using a triode plasma configuration |
Author: |
An, Jeong-Ho Hong, Ji-Eun Mo, Sung-In Jo, Yimhyun Choi, Sinho Kim, Tae-Hee Oh, Soong Ju Jeong, Kyung Taek Song, Hee-eun Oh, Joon-Ho Kim, Ka-Hyun |
Appeared in: |
Solar energy materials and solar cells |
Paging: |
Volume 283 () nr. C pages p. |
Year: |
2025 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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