Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells
Titel:
Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells
Auteur:
Macco, Bart van de Poll, Mike L. van de Loo, Bas W.H. Broekema, Tim M.P. Basuvalingam, Saravana B. van Helvoirt, Cristian A.A. Berghuis, Wilhelmus J.H. Theeuwes, Roel J. Phung, Nga Kessels, Wilhelmus M.M.