Exceptional silicon surface passivation by an ONO dielectric stack
Titel:
Exceptional silicon surface passivation by an ONO dielectric stack
Auteur:
Kho, Teng Choon Fong, Kean McIntosh, Keith Franklin, Evan Grant, Nicholas Stocks, Matthew Phang, Sieu Pheng Wan, Yimao Wang, Er-Chien Vora, Kaushal Ngwe, Zin Blakers, Andrew