Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach
Titel:
Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach
Auteur:
Tiggelaar, Roald M Veenstra, Theo T Sanders, Remco G.P Berenschot, Erwin Gardeniers, Han Elwenspoek, Miko Prak, Albert Mateman, Richard Wissink, Jeroen M van den Berg, Albert