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Target properties optimization on capacitive-type humidity sensor: Ingredients hybrid and integrated passive devices fabrication |
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Titel: |
Target properties optimization on capacitive-type humidity sensor: Ingredients hybrid and integrated passive devices fabrication |
Auteur: |
Yu, He Liang, Jun-Ge Wang, Cong Liu, Cheng-Cai Bai, Bing Meng, Fan-Yi Zou, Dan-Qing Ali, Luqman Jing, Chang-Qiang Zhao, Meng Wang, Lei Gu, Xiao-Feng |
Verschenen in: |
Sensors and Actuators. B, Chemical |
Paginering: |
Jaargang 340 () nr. C pagina's p. |
Jaar: |
2021 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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