A low-power embedded poly-Si micro-heater for gas sensor platform based on a FET transducer and its application for NO2 sensing
Titel:
A low-power embedded poly-Si micro-heater for gas sensor platform based on a FET transducer and its application for NO2 sensing
Auteur:
Jung, Gyuweon Hong, Yoonki Hong, Seongbin Jang, Dongkyu Jeong, Yujeong Shin, Wonjun Park, Jinwoo Kim, Donghee Jeong, Chan Bae Kim, Dong Uk Chang, Ki Soo Lee, Jong-Ho