Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode
Titel:
Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode
Auteur:
Kucera, Martin Wistrela, Elisabeth Pfusterschmied, Georg Ruiz-Díez, Víctor Manzaneque, Tomás Hernando-García, Jorge Sánchez-Rojas, José Luis Jachimowicz, Artur Schalko, Johannes Bittner, Achim Schmid, Ulrich