Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors
Titel:
Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors
Auteur:
Niskanen, Antti J. Varpula, Aapo Utriainen, Mikko Natarajan, Gomathi Cameron, David C. Novikov, Sergey Airaksinen, Veli-Matti Sinkkonen, Juha Franssila, Sami