AlGaN/GaN biosensor—effect of device processing steps on the surface properties and biocompatibility
Titel:
AlGaN/GaN biosensor—effect of device processing steps on the surface properties and biocompatibility
Auteur:
Cimalla, I. Will, F. Tonisch, K. Niebelschütz, M. Cimalla, V. Lebedev, V. Kittler, G. Himmerlich, M. Krischok, S. Schaefer, J.A. Gebinoga, M. Schober, A. Friedrich, T. Ambacher, O.