|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 5 of 16 found articles
| Title: |
Bulk micromachined silicon comb-drive electrostatic actuators with diode isolation |
| Author: |
Syms, R.R.A. Hardcastle, B.M. Lawes, R.A. |
| Appeared in: |
Sensors and Actuators. A, Physical |
| Paging: | Volume 63 (1997) nr. 1 pages 7 p. |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 16 found articles
| << previous | next >> |