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Journal description
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Details for article 26 of 46 found articles
| Title: |
Micromachined sensor structures with linear capacitive response |
| Author: |
Rosengren, Lars Söderkvist, Jan Smith, Leif |
| Appeared in: |
Sensors and Actuators. A, Physical |
| Paging: | Volume 31 (1992) nr. 1-3 pages 6 p. |
| Year: |
1992 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 26 of 46 found articles
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