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Journal description
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Details for article 30 of 36 found articles
| Title: |
Process-induced stress and hydrogen effects on monolithic integrated BiCMOS-MEMS resonators |
| Author: |
Zhao, Danqi Zhang, Xia He, Jun Huang, Xian Yang, Fang Liu, Peng Zhang, Dacheng |
| Appeared in: |
Sensors and Actuators. A, Physical |
| Paging: | Volume 202 (2013) nr. C pages 10 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 30 of 36 found articles
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