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Journal description
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Details for article 19 of 23 found articles
| Title: |
Study of Ru etching using O2/Cl2 helicon plasmas |
| Author: |
Kim, Hyoun Woo Han, Jae-Hyun Ju, Byong-Sun Kang, Chang-Jin Moon, Joo-Tae |
| Appeared in: |
Materials science and engineering. B, Solid-state materials for advanced technology |
| Paging: | Volume 95 (2002) nr. 3 pages 5 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 19 of 23 found articles
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