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Journal description
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Details for article 13 of 18 found articles
| Title: |
Interfacial reactions and failure mechanism of Cu/Ta/SiO2/Si multilayer structure in thermal annealing |
| Author: |
Latt, Khin Maung Lee, Y.K. Osipowicz, T. Park, H.S. |
| Appeared in: |
Materials science and engineering. B, Solid-state materials for advanced technology |
| Paging: | Volume 94 (2002) nr. 1 pages 10 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 18 found articles
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