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Journal description
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Details for article 21 of 21 found articles
| Title: |
Structural and electrical characterization of Si(100) implanted with P+ and Si+ ions along the [100] channelling direction |
| Author: |
Schreutelkamp, R.J. De Reus, R. Saris, F.W. Kaim, R.E. Westendorp, J.F.M. Janssen, K.T.F. Ottenheim, J.J.M. |
| Appeared in: |
Materials science and engineering. B, Solid-state materials for advanced technology |
| Paging: | Volume 7 (1990) nr. 1-2 pages 17 p. |
| Year: |
1990 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 21 found articles
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