Caracterization of AIN buffer layers on (0001)-sapphire substrates 1 This work was partially supported by the Direction Générale de l'Armement, Direction de la Recherche et des Etudes Techniques (DRET). 1
Titel:
Caracterization of AIN buffer layers on (0001)-sapphire substrates 1 This work was partially supported by the Direction Générale de l'Armement, Direction de la Recherche et des Etudes Techniques (DRET). 1
Auteur:
Le Vaillant, Y.M. Bisaro, R. Olivier, J. Durand, O. Duboz, J.Y. Ruffenach-Clur, S. Briot, O. Gil, B. Aulombard, R.L.
Verschenen in:
Materials science and engineering. B, Solid-state materials for advanced technology