Effects of thickness and deposition temperature of ALD ZnO thin films on the improvement of electrical properties through dedicated low temperature annealing post-processing
Titel:
Effects of thickness and deposition temperature of ALD ZnO thin films on the improvement of electrical properties through dedicated low temperature annealing post-processing
Auteur:
Starowicz, Zbigniew Dawidowski, Wojciech Ostapko, Jakub Wlazło, Mateusz Putynkowski, Grzegorz Szczerba, Maciej Jakub Woźny, Janusz Wełna, Monika Gawlińska-Nęcek, Katarzyna Panek, Piotr
Verschenen in:
Materials science and engineering. B, Solid-state materials for advanced technology