Characterization of removal mechanisms in LiTaO3 single crystals under various polishing techniques: A comparative study using nanoindentation and nanoscratch techniques
Titel:
Characterization of removal mechanisms in LiTaO3 single crystals under various polishing techniques: A comparative study using nanoindentation and nanoscratch techniques
Auteur:
Hang, Wei Lai, Zhengye Wu, Lingwei Chen, Hongyu Li, Yong Zhu, Weijun Cui, Kun Song, Wei Shi, Xuxia Ma, Yi
Verschenen in:
Materials science and engineering. B, Solid-state materials for advanced technology