Study of the effect of the deposition parameters on the structural, electric and optical characteristics of polymorphous silicon films prepared by low frequency PECVD
Titel:
Study of the effect of the deposition parameters on the structural, electric and optical characteristics of polymorphous silicon films prepared by low frequency PECVD
Auteur:
Moreno, M. Torres, A. Ambrosio, R. Zuñiga, C. Torres-Rios, A. Monfil, K. Rosales, P. Itzmoyotl, A.
Verschenen in:
Materials science and engineering. B, Solid-state materials for advanced technology