New alternative arsenic precursors for the metal-organic vapour-phase epitaxy of III–V semiconductors: in-situ formation of AsH functionality by β elimination of specific metal-organic arsenic compounds
Titel:
New alternative arsenic precursors for the metal-organic vapour-phase epitaxy of III–V semiconductors: in-situ formation of AsH functionality by β elimination of specific metal-organic arsenic compounds
Auteur:
Gimmnich, P. Greiling, A. Lorberth, J. Thalmann, C. Rademann, K. Zimmermann, G. Protzmann, H. Stolz, W. Göbel, E.O.
Verschenen in:
Materials science and engineering. B, Solid-state materials for advanced technology