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Journal description
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Details for article 2 of 49 found articles
| Title: |
A comparison of pulsed-laser-deposited and ion-beam-enhanced-deposited AlN thin films for SOI application |
| Author: |
Men, Chuanling Lin, Chenglu |
| Appeared in: |
Materials science and engineering. B, Solid-state materials for advanced technology |
| Paging: | Volume 133 (2006) nr. 1-3 pages 5 p. |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 49 found articles
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