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Synthesis of oxides in Si0.5Ge0.5 alloy by high dose oxygen ion implantation |
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Titel: |
Synthesis of oxides in Si0.5Ge0.5 alloy by high dose oxygen ion implantation |
Auteur: |
Castle, J.E. Liu, H.D. Watts, J.F. Hemment, P.L.F. Zhang, J.P. Newstead, S.M. Powell, A.R. Whall, T.E. Parker, E.H.C. |
Verschenen in: |
Materials science and engineering. B, Solid-state materials for advanced technology |
Paginering: |
Jaargang 12 (1992) nr. 1-2 pagina's 5 p. |
Jaar: |
1992 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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