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Journal description
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Details for article 12 of 21 found articles
| Title: |
Physical properties of ALD-Al2O3 in a DRAM-capacitor equivalent structure comparing interfaces and oxygen precursors |
| Author: |
Jakschik, S Schroeder, U Hecht, T Dollinger, G Bergmaier, A Bartha, J.W |
| Appeared in: |
Materials science and engineering. B, Solid-state materials for advanced technology |
| Paging: | Volume 107 (2004) nr. 3 pages 4 p. |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 21 found articles
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