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Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesised in thin SiO2 layers |
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Title: |
Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesised in thin SiO2 layers |
Author: |
Carrada, M. Cherkashin, N. Bonafos, C. Benassayag, G. Chassaing, D. Normand, P. Tsoukalas, D. Soncini, V. Claverie, A. |
Appeared in: |
Materials science and engineering. B, Solid-state materials for advanced technology |
Paging: |
Volume 101 (2003) nr. 1-3 pages 4 p. |
Year: |
2003 |
Contents: |
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Publisher: |
Elsevier Science B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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