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Journal description
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Details for article 4 of 31 found articles
| Title: |
Characterizations of elastic behaviors of silicon nitride thin films with varying thicknesses |
| Author: |
Ren, Yuxing Lam, David C.C. |
| Appeared in: |
Materials science and engineering. A, Structural materials: properties, microstructure and processing |
| Paging: | Volume 467 (2007) nr. 1-2 pages 4 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 31 found articles
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