Ion beam deposition and surface characterization of thin multi-component oxide films during growth 1 Invited paper presented at the Engineering Conference on Ion Beam Surface Modification of Ceramics, Il Ciocco, Italy, May 19–23, 1997. 1
Titel:
Ion beam deposition and surface characterization of thin multi-component oxide films during growth 1 Invited paper presented at the Engineering Conference on Ion Beam Surface Modification of Ceramics, Il Ciocco, Italy, May 19–23, 1997. 1
Auteur:
Krauss, A.R. Im, J. Smentkowski, V. Schultz, J.A. Auciello, O. Gruen, D.M. Holocek, J. Chang, R.P.H.
Verschenen in:
Materials science and engineering. A, Structural materials: properties, microstructure and processing