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Electrochemical aspects of corrosion resistance and etching of metallizations for microelectronics |
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Titel: |
Electrochemical aspects of corrosion resistance and etching of metallizations for microelectronics |
Auteur: |
Comizzoli, R.B. Frankenthal, R.P. Hanson, K.J. Konstadinidis, K. Opila, R.L. Sapjeta, J. Sinclair, J.D. Takahashi, K.M. Frank, A.L. Ibidunni, A.O. |
Verschenen in: |
Materials science and engineering. A, Structural materials: properties, microstructure and processing |
Paginering: |
Jaargang 198 (1995) nr. 1-2 pagina's 8 p. |
Jaar: |
1995 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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