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Journal description
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Details for article 243 of 407 found articles
| Title: |
Mechanisms of multiple functional groups in post-CMP cleaning solutions for Co interconnects |
| Author: |
Zhang, Lifei Yan, Mei Lu, Xinchun |
| Appeared in: |
Colloids and surfaces. A, Physicochemical and engineering aspects |
| Paging: | Volume 705 () nr. P2 pages p. |
| Year: |
2025 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 243 of 407 found articles
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