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Journal description
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Details for article 5 of 31 found articles
| Title: |
Deposition of fluorinated polyimide consisting of 6FDA and TFDB into microscale trenches using supercritical carbon dioxide |
| Author: |
Haruki, Masashi Oda, Asuka Wasada, Atsuhiko Kihara, Shin-ichi Takishima, Shigeki |
| Appeared in: |
The Journal of supercritical fluids |
| Paging: | Volume 119 (2017) nr. C pages 238-244 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 31 found articles
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