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Journal description
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Details for article 4 of 28 found articles
| Title: |
Deposition of ODA-PMDA types of polyimide thin film inside a microscopic-scale space using supercritical carbon dioxide |
| Author: |
Haruki, Masashi Hasegawa, Yumi Kihara, Shin-ichi Takishima, Shigeki |
| Appeared in: |
The Journal of supercritical fluids |
| Paging: | Volume 100 (2015) nr. C pages 6 p. |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 28 found articles
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