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                                       Details for article 27 of 29 found articles
 
 
  Trace metal analysis on hafnium silicate deposited Si wafer by Total Reflection X-ray Fluorescence
 
 
Title: Trace metal analysis on hafnium silicate deposited Si wafer by Total Reflection X-ray Fluorescence
Author: Takahara, Hikari
Murakami, Hiroyuki
Kinashi, Toru
Sparks, Chris
Appeared in: Spectrochimica acta. Part B, Atomic spectroscopy
Paging: Volume 63 (2008) nr. 12 pages 4 p.
Year: 2008
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 27 of 29 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands