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                                       Details for article 10 of 25 found articles
 
 
  Hydrogen analysis in silicon and silicon nitride layers
 
 
Title: Hydrogen analysis in silicon and silicon nitride layers
Author: Vandervorst, W.B.
Maes, H.E.
Appeared in: Spectrochimica acta. Part B, Atomic spectroscopy
Paging: Volume 40 (1985) nr. 5-6 pages 5 p.
Year: 1985
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 10 of 25 found articles
 
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