Thermodynamic modeling framework with experimental investigation of the large-scale bonded area and local void in Cu-Cu bonding interface for advanced semiconductor packaging
Titel:
Thermodynamic modeling framework with experimental investigation of the large-scale bonded area and local void in Cu-Cu bonding interface for advanced semiconductor packaging
Auteur:
Oh, Sung-Hyun Lee, Hyun-Dong Lee, Jae-Uk Park, Sung-Ho Cho, Won-Seob Park, Yong-Jin Haag, Alexandra Watanabe, Soichi Arnold, Marco Lee, Hoo-Jeong Lee, Eun-Ho