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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 9 of 14 found articles
| Title: |
Fine grinding of silicon wafers: effects of chuck shape on grinding marks |
| Author: |
Sun, Wangping Pei, Z.J. Fisher, G.R. |
| Appeared in: |
International journal of machine tools & manufacture |
| Paging: | Volume 45 (2005) nr. 6 pages 14 p. |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 14 found articles
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